Exploring the Atomic World of Chemical Vapour Deposition: Insights from Density Functional Theory
Chemical Vapour Deposition (CVD) is an essential technique for growing metallic films, and it has been around for over a century. Today, the range of applications for CVD has expanded to include electrical, optoelectronic, optical, mechanical, and chemical materials, among others. To understand the growth processes and improve product characteristics, researchers rely on quantum mechanical calculations, particularly density functional theory (DFT).